FEI Themis ETEM - FEG Scanning Transmission Electron Microscope


Location: Institute headquarters, Bratislava

Main features

  • operates in TEM and STEM mode
  • atomic resolution combined with high analytical capabilities
  • multi-signal detection from up to four signal simultaneously to accelerate scanning transmission electron microscopy (S/TEM) imaging
  • Cs Probe Correctorfor sub-A resolution in STEM mode
  • super X: High-sensitivity, windowless EDX detector system based on SDD technology
  • electron energy loss spectroscopy (EELS)
  • field-free imaging in Lorentz mode with 2nm resolution for magnetic property studies
  • micro-tomography
  • cryo-electron microscopy

Basic technical parameters

  • accelerating voltage (X-FEG) – (80, 200, 300) kV
  • resolution: 200 kV performance - TEM information limit ≤ 0.8 Å; HR-STEM resolution ≤ 0.8;
  • EDX: output count rate up to 200 Kcps120 mm2 combined detector area, detection of all elements down to boron
  • holders: single tilt holder
  • double tilt holder
  • cryo holder
  • detectors: TEM - CMOS based FEI CETA camera; STEM- HAADF, BF, DF2, DF4; EDX – Super X windowless EDX; EELS – Enfiniumspektrometer

 FEI Themis ETEM

Contact

Štefan Nagy