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Simulation of interaction trajectories between incident electron beam and specimen


General purpose

Casino is a program, where a Monte Carlo simulation of electron trajectory in solid is especially designed for low electron beam interactions in both bulk and thin foils. At once, X-rays and backscattered electrons in a scanning electron microscope can be simulated.

Principle of operation

Casino was programmed by the research team of Raynald Gauvin (Ph.D., Full professor at Université de Sherbrooke, Québec, Canada). In general, the program is based on different models which unable to simulate the interaction between incident electron beam and solid. A sufficiently large amount of electron trajectories is assured by this simulation in a various solid with the aim to represent the condition used to image structures in a scanning electron microscope (SEM). Therefore, it is possible to predict theoretically the signals observed in the SEM.

Application of the technique

Since, simulation of the interaction between an incident electron beam and matter gives information about the depth of X-rays electrons, itcan be sufficiently used to:

Typical case studies

Effect of the accelerated voltage on the interaction volume between an incident electron beam and specimen for aluminium
Al x 3000 5kVVoltage 5kV
Al x 3000 15kVVoltage 15kV

Effect of the chemical element (Al and Fe) on the interaction volume for certain accelerated voltage 15kV
Al x 3000 15kVInteraction volume for Al
Fe x 3000 15kVInteraction volume for Fe

Effect of the sample tilting on the interaction volume for certain accelerated voltage 15kV
Al x 3000 15kVNo tilt
Al x 3000 15kV 70DTilt 70° (tilt 70° is used for EBSD measurement)

Contact

Martin Nosko
Ľubomír Orovčík