Institute of materials and machine mechanics
Slovak Academy of sciences
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incident electron beam and specimen
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Tescan VEGA3 XMU- Scanning electron microscope
Location:
INOVAL - Innovation center
, Ladomerská Vieska
Main features
high resolution observation combined with high analytical capabilities
an extra large analytical chamber with a full 5-axis motorized stage
full operating vacuum reached within a few minutes
investigation of non-conductive samples
5 electron optics working modes: resolution, depth, field, wide field, channeling
LVSTD (up to 500 Pa) - original SE detector for low vacuum operations
energy dispersive X-ray analyzer (EDS) Oxford Instruments X-max 50 mm
2
Basic technical parameters
tungsten heated cathode
resolution in high vacuum mode (SE): 3 nm at 30 kV, 8 nm at 3 kV
resolution in low vacuum mode (BSE, LVSTD): 3.5 nm at 30 kV
magnification 1x – 1,000,000x
maximum field of view: 24 mm at WD 30 mm
accelerating voltage: 200 V to 30 kV
probe current: 1 pA to 2μA
pumping time after specimen exchange typically under 3.5 minutes
rotation: 360°continuous
tilt: -30° to +90°