Tescan VEGA3 XMU- Scanning electron microscope


Location: Branch INOVAL, Ladomerská Vieska

Main features

  • high resolution observation combined with high analytical capabilities
  • an extra large analytical chamber with a full 5-axis motorized stage
  • full operating vacuum reached within a few minutes
  • investigation of non-conductive samples
  • 5 electron optics working modes: resolution, depth, field, wide field, channeling
  • LVSTD (up to 500 Pa) - original SE detector for low vacuum operations
  • energy dispersive X-ray analyzer (EDS) Oxford Instruments X-max 50 mm2

Basic technical parameters

  • tungsten heated cathode
  • resolution in high vacuum mode (SE): 3 nm at 30 kV, 8 nm at 3 kV
  • resolution in low vacuum mode (BSE, LVSTD): 3.5 nm at 30 kV
  • magnification 1x – 1,000,000x
  • maximum field of view: 24 mm at WD 30 mm
  • accelerating voltage: 200 V to 30 kV
  • probe current: 1 pA to 2μA
  • pumping time after specimen exchange typically under 3.5 minutes
  • rotation: 360°continuous
  • tilt: -30° to +90°

 TESCAN