JEOL JSM-6610LV -Scanning electron microscope


Location: R&D centre ENERMAT, Trnava

Main features

  • high resolution microstructural observation combined with analytical capabilities
  • super conical objective lens
  • stage navigation system
  • working at low pressure  10 to 270 Pa
  • energy dispersive X-ray analyser (EDS) OI X-max 80 mm2; EDS detection range from Be to Pu
  • low vacuum secondary electron detector

Basic technical parameters

  • resolution: 3.0 nm (30 kV) , 8.0 nm (3 kV), 15 nm (1 kV) at HV mode,4.0 nm (30 kV) at LV mode
  • magnification:× 5 to × 300,000 (on 128 mm × 96 mm image size)
  • accelerating voltage: 0.3kV to 30 kV,
  • probe current: 10-12 to 10-6 A,
  • specimen stage: Eucentric large-specimen motorized axes stage: x-y: 125 mm x 100 mm, tilt: -10° to ~+90°, rotation: 360°, working distance: 5 mm to 80 mm

 JEOL JSM-6610LV