magnification – × 5 to × 300,000 (on 128 mm × 96 mm imagesize)
accelerating voltage – 0.3kV to 30 kV
specimen stage - eucentric large-specimen stage axes motorized, x-y: 125 mm x 100 mm, tilt: -10° to ~+90°, rotation: 360°, working distance: 5 mm to 80 mm