magnification:× 5 to × 300,000 (on 128 mm × 96 mm image size)
accelerating voltage: 0.3kV to 30 kV,
probe current: 10-12 to 10-6 A,
specimen stage: Eucentric large-specimen motorized axes stage: x-y: 125 mm x 100 mm, tilt: -10° to ~+90°, rotation: 360°, working distance: 5 mm to 80 mm