JEOL 7600F Schotky field emission scanning electron microscope

Main features

• high resolution observation combined with high analytical capabilities
• ultra high resolution at low kV (gentle beam mode)
• Gentle Beam mode – improves image resolution, reduces charging and beam damage, shows pure surface topographic information
• ultra low acceleration voltage imaging for nonconductive specimen
• new energy filter
• high and low angle backscattered electron detectors
• EDS analysis
• WDS analysis
• EBSD analysis
• large specimen chamber for a 200mm diameter specimen

Basic technical parameters

• resolution - 1.0nm（15kV), 1.5nm（1kV)
• magnification – 25 to 1 000 000
• accelerating voltage – 0.1kV to 30 kV
• probe current – 1pA to 200 nA
• specimen stage - eucentric, 5 axes motor control, x-y:110 mm x 80 mm, tilt:-5° to ～＋70°, rotation: 360 °, working distance: 1.5 mm to 25 mm, specimen size: diameter 200 mm (max),  height 25 mm (max)