JEOL 7600F Schotky field emission scanning electron microscope


Location: Institute headquarters, Bratislava

Main features

  • high resolution observation combined with high analytical capabilities
  • ultra high resolution at low kV (gentle beam mode)
  • Gentle Beam mode – improves image resolution, reduces charging and beam damage, shows pure surface topographic information
  • ultra low acceleration voltage imaging for nonconductive specimen
  • new energy filter
  • high and low angle backscattered electron detectors
  • EDS analysis
  • WDS analysis
  • EBSD analysis
  • large specimen chamber for a 200mm diameter specimen

Basic technical parameters

  • resolution - 1.0nm(15kV), 1.5nm(1kV)
  • magnification – 25 to 1 000 000
  • accelerating voltage – 0.1kV to 30 kV
  • probe current – 1pA to 200 nA
  • specimen stage - eucentric, 5 axes motor control, x-y:110 mm x 80 mm, tilt:-5° to ~+70°, rotation: 360 °, working distance: 1.5 mm to 25 mm, specimen size: diameter 200 mm (max),  height 25 mm (max)

  JEOL 7600F  

Contact

Martin Nosko
Ľubomír Orovčík